@article{article, title  = {{The effect of ion-beam specimen preparation techniques on vacancy-type defects in silicon}},

 publisher = {{Elsevier BV}},

 url = {{}},

 year = {{2006}},

 month = {{1}},

 author = {{Gandy AS and Donnelly SE and Beaufort M-F and Vishnyakov VM and Barbot J-F}},

 doi = {{10.1016/j.nimb.2005.08.097}},

 volume = {{242}},

 journal = {{Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms}},

 issue = {{1-2}},

 pages = {{610-613}},

 note = {{Accessed on 2024/10/23}}}