TY  - JOUR

T1  - Nanofabrication by 3D E-beam cutting

JO  - Microscopy and Microanalysis

PY  - 2008/01/01

AU  - Gnanavel T

AU  - Saghi Z

AU  - Peng Y

AU  - Möbus G

ED  - 

DO  - DOI: 10.1017/S1431927608085413

VL  - 14

IS  - SUPPL. 2

SP  - 460

EP  - 461

Y2  - 2024/12/26

ER  -