@article{article, title  = {{Nanofabrication by 3D E-beam cutting}},

 url = {{}},

 year = {{2008}},

 month = {{1}},

 author = {{Gnanavel T and Saghi Z and Peng Y and Möbus G}},

 doi = {{10.1017/S1431927608085413}},

 volume = {{14}},

 journal = {{Microscopy and Microanalysis}},

 issue = {{SUPPL. 2}},

 pages = {{460-461}},

 note = {{Accessed on 2025/01/13}}}