@article{article, title = {{Optical nanolithography using a scanning near-field probe with an integrated light source}}, url = {{}}, year = {{2008}}, month = {{11}}, author = {{Kingsley JW and Ray SK and Adawi AM and Leggett GJ and Lidzey DG}}, doi = {{10.1063/1.3032912}}, volume = {{93}}, journal = {{APPL PHYS LETT}}, issue = {{21}}, note = {{Accessed on 2024/10/23}}}