TY  - JOUR

T1  - The Effect of Surface States on Secondary Electron (SE) Dopant Contrast from Silicon p-n Junctions

JO  - MRS Proceedings

PY  - 2007/06/12

AU  - Chee AKW

AU  - Rodenburg C

AU  - Humphreys CJ

ED  - 

DO  - DOI: 10.1557/proc-1026-c04-02

PB  - Cambridge University Press (CUP)

VL  - 1026

Y2  - 2025/01/13

ER  -