TY  - CHAP

T1  - 3D determination of a MOSFET gate morphology by FIB tomography

T2  - Microscopy of Semiconducting Materials 2003

PY  - 2018/01/01

AU  - Inkson BJ

AU  - Olsen S

AU  - Norris DJ

AU  - Oʼneill AG

AU  - Mobus G

ED  - 

DO  - DOI: 10.1201/9781351074636

SN  - 9781315895536

SP  - 611

EP  - 616

Y2  - 2024/12/26

ER  -